Cost of Ownership

LEI RS300 Sheet Resistance and Thickness Mapping
200 mm and 300 mm Wafers

The excel file,  lei34.xls, in the listed Excel folder gives two cost of ownership estimates that use the following assumptions:

1. List price for the RS300 as of 9/26/01. A 3 range system without mini-environment or FOUP was used.

2. This version adds a preliminary estimate for a mini-environment with FOUP.

For 1. above the estimate results in a total cost per measured wafer of $0.09 for a system used during all available time. Even for a system price near $700,000 as in 2. above the total cost per measured wafer would be $.23.

Please use these estimates with caution. System costs will depend on customer requirements. The estimates we are using here do not include items like edge gripping robotic wafer handling or full compliance with GEM SECS for 300 mm.