Contactless Bulk Resistivity/Sheet Resistance/Capacitance Thickness
Measurement and Mapping Systems

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Linearity -.035 to 3,000 Ohms/square < ± 3% Sensor Transducer Sizes -HI Range 14 mm diameter -LO Range 14  mm diameter   -XL Range 14 mm diameter

 

Characterization of
-GaAs wafers (epi, annealed
 ion-implants on semi-insulating and
 some doped* substrates)
-Silicon wafers (bulk Si, epi, annealed
 ion-implants and POCl₃ doping
 uniformity on high resistivity
 substrates)
-Thin film metallizations
* Contact factory for details

Performance
(Conforms to ASTM F673)
-Based on the average of three 150 center-
 point tests (contact LEI for complete
 details). Where available, the data below
 is derived using NIST-traceable, uniformly-
 doped silicon standards. These tests are
 conducted with samples manually placed
 on handler rails and a ³.035" gap setting.
 NIST and VLSI standard wafers are
 available for calibration.

Measurement Capabilities
-Nominal sample thickness range of
 450 to 800 microns
-Normal coil gap (>/=.035"/.889mm)
  preset at factory
-Factory-adjustable gap to accomodate
 thicker substrates
-Robotic handling of 2", 3", 4" (100 mm),
 6" (150mm) and 8" (200 mm) wafers    

Customers making measurements much higher and lower; this chart is based on available reference wafers.

†Based on keyboard entry of known thickness
*Sheet Resistance values not equal to Bulk
 Resistivity values
 

Thin-film thickness
-Thickness = (Bulk Resistivity) /
                   (Sheet Resistance)

Wafer Thickness 
-Capable of calculating resistivity with
 measured or keyboard-entered thickness
-Optional contactless capacitance and
 air gages available for automatic entry

Sample Handling and Sensing
-Up to 300 measurement points
-Automatic drift compensation
-Software-selectable resistivity ranges

Operating Characteristics
-High spatial resolution
-Precise voltage regulation for tight
 linearity and consistently repeatable
 results

Calibration
-Fully-automated
-Performed via easy-entry computer
 screen
-Software-controlled (no manual
 adjustments)
-16 bitsystem for data acquisition

Computerization
-System is network- and Windows XP
 compatible
-Setup information may be saved under
 operator-designated file names
-Ability to create custom test point plans
-Measurements and associated test
 plans can be graphically displayed
-Computer, monitor and printer included
-Ethernet network connection

Now Available
-GEM/SECS upgrade
-Bar code scanning capabilities
-Robotic wafer scanning

Also Available
LEI 1510M40 offers 1510-level measurement capabilities at a resonable price--perfect for university and low-volume production applications.

1510 Standalone with optional Light Shield