LEI Model 1530A Non-Destructive Flat Panel
Sheet Resistance Measurement

1530A Detail

Non-destructive Flat Panel Measurements
- reduce costs
- assure maximum target utilization -assure uniformity from panel to panel
- detect nonuniformity caused by target wear
-customized measurement plans from 15 to approximately 33 points
- throughput based on test plan and number of points (1 min for 15 points)
- variable substrates from 550x650 to 1000x1100mm

The robot end effector  removes the
1.1 x 1.0 meter panel from the cassette and takes it down to the testing area and inserts it between the upper and lower sensors which are positioned in the center of the 1.0 meter panel width and 25mm in from each edge.

Vacuum chucks will eliminate sag during measurement. Measurement made at 5 different locations along the 1.1 meter length.

Panel is returned to original cassette position after measurement.

Download the full .pdf version of the LEI 1530A brochure here.

 

Patent applied for
c 1999 Lehighton Electronics, Inc.