1510M40
Mobility
1500 Series
RS300
Profiler
Hg Probes
Flat Panel
Flat Panel Tool
Miller Feedback Profiler System II

Miller Feedback Profiler 

Applications:
-
Bulk, epitaxial and ion implanted
 wafers
-Epitaxial and implanted GaAs wafers
-Process control wafers
-Special sharp peak structures

Measurement Parameter:
-
Carrier density vs depth data

Sample Plot 

System Features:
-On-screen real time plot (N vs X)
-Graphical and columnar data
 representations
-Keyboard selectable BIAS and
 DEPTH modes
-Menu screen entries for all system
 parameters
-Integrated calibration routine
-Easy-to-use TRAP detection feature

Application Analysis 

CONTACT LEI
 
techsupport@lehighton.com
monitored Monday-Friday, 7:00 a.m.- 4:30 p.m. Eastern Time

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LEHIGHTON  ELECTRONICS, INC . P.O. Box 328  Lehighton, PA 18235-0328 
 (800) 535-1112  (610) 377-5990  FAX (610) 377-6820

© 2004 Lehighton Electronics, Inc.