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LEI 1510M40 1510-level measurement capabilities at a reasonable price—perfect for university and low-volume production applications. |
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LEI Model 1600
Non-destructive carrier mobility, sheet charge density and sheet resistance measurements for 2" - 6" wafers
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LEI 1500 Series
Process monitoring for high production yields, contactless sheet resistance and thickness of conductive process layers and thickness / resistivity of doped, bulk wafers 2"-200mm |
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LEI RS300 Process
monitoring for high production yields, contactless sheet resistance and thickness of conductive process layers and thickness / resistivity of doped, bulk wafers 4"-300mm |
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LEI Miller Feedback Profiler System II
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LEI 2017/2017B Mercury Probes
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LEI Model 1530A Flat Panel Display Sheet Resistance and Mapping |
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LEI Model 1500LS Flat Panel Tool - Manual Positioning |
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