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Frequently Asked Questions 1. Can I buy LEI's test equipment with
only the ranges that apply to my product/application?
Yes
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High: 15 - 3000 Ohms/sq.
Low: 0..2 - 15 Ohms/sq.
Extra Low: 0.035 - 1.5 Ohms/sq |
Customers using much higher and lower; spec based on available reference materials. |
. The measurement ranges available are as follows:
The 1500 and RS300 series instruments are available with any or all of these measurement ranges. You may complete an
Application Analysis Form and submit
it to us; we would be happy to discuss your needs and quote a price for the instrument that best meets them.
2. What is the throughput of LEI's test equipment?
A 1510C will run a 55-point mapping plan in 2.25 minutes per wafer; in contrast, the 1510B requires 5:30 to perform the same operation. Both instruments are
available with optional robotic wafer handling. This allows the instrument to measure for extended periods of time with little or no operator intervention.
Newer variations of the 1510 also feature robotic sorting capabilities.
3. What calibration wafers do I need to purchase for use with LEI's test equipment?
The calibration wafers needed will depend on your application. For optimal accuracy, we recommend purchasing NIST or VLSI standard wafers (available
through LEI) that are as close as possible to the sheet resistance values of the wafers you are producing.
4. What is an eddy current and how does it work?
A brief explanation of the eddy current measurement method is available on request. Please contact us if you would like a copy.
5. How much do your units cost?
Price varies greatly depending on the options selected (speed, robotics, advanced
mapping, # of measurement ranges, etc.). If you are interested in learning more about LEI and our complete line of contactless process monitoring instrumentation, please feel free to contact us for more information or a quote.
Our sales staff will be happy to discuss the features that will best suit your needs.
6. Do you offer units that are less expensive?
Occasionally. While we do not maintain an inventory of used instruments, from
time to time we allow customers to "trade in" their old units when they purchase a new one, or we offer slightly used demo units for sale Please contact us for information on the availability of used instruments.
7. Am I eligible for a discount?
LEI is not able to discount its units, other than the 1 or 1-1/2% prompt payment reduction offered in some cases. A portion of our sales are to US Government
purchasers, and we have agreed not to undercut the prices we offer to those customers unless discounts are earned by allowing demos, references to our instruments in papers, referring your customers to us, etc.
8. What improvements do the new units offer?
In addition to faster throughput, the 1510RS offers cassette-to-cassette sorting, a XP-compliant Windows NT operating environment, cleanroom-friendly Bosch
cabinet, and other features. The RS300 (for Si wafers up to 300 mm) offers these same improvements, as well as GEM/SECS II compatibility, capacitance thickness
measurement capability, HERMOS, and more. Please contact us for more details.. Submit a question of your own.
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