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Miller Profiler

profiler plot

 

   Miller Profiler

Applications

• Bulk, epitaxial and ion implanted wafers -

• Epitaxial and implanted GaAs wafers -

• Process control wafers -

• Special sharp peak structures

Measurement Parameter

• Carrier density vs depth data

System Features

• On-screen real time plot (N vs X) -

• Graphical and columnar data representations -

• Keyboard selectable BIAS and DEPTH modes -

• Menu screen entries for all system parameters -

• Integrated calibration routine -

• Easy-to-use TRAP detection feature

documentDownload the brochure

     

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