LEI 1510 Standalone (Shown with Optional Light Shield)		Model 1510 Standalone Measurement and Mapping Systems
		Process Monitoring & Quality Control for High Production Yields, efficiency, and maximize production uptime. Characterization of : • All Compound Semiconductor materials (epi, annealed ion-implants on semi insulating and some doped substrates) • Silicon wafers (bulk Si, epi, annealed ion-implants, and POCl3 doping uniformity on high resistivity substrates) • Thin film metallization (Contact factory for details) Measurement Capabilities • Normal coil gap (>/= .035”/.889mm) • Wafer sizes 2” (50mm) to 8” (200mm) wafers • Manual loading Download the brochure