Model RS300 100mm - 300mm Silicon
		Contactless Bulk Resistivity/Sheet Resistance/Capacitance Thickness Features • GaAs wafers (epi, annealed ion-implants on semi-insulating and some doped* substrates) • Non-destructive characterization of 100mm to 300mm Si wafers • GEM/SECSII compliance • LEI Windows NT Software (standard) • HERMOS available -Bar-code scanning availability -Scanning end effector Download the brochure